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Leybold TURBOVAC 361C / TURBOVAC 361

The Leybold TURBOVAC 361 (C) is an oil-free pump for the generation of clean high and ultrahigh vacuum conditions. It has high performance in any orientation and is very reliable.

If pumping corrosive or aggressive gases, the “C” type version of this turbopump that is equipped with a purge port must be used. The turbopump must be purged and vented through its purge port using the optional purge/vent valve. The purge/vent valve allows a constant flow of inert gas into the motor/bearing cavity to prevent harmful process gas from entering the bearing cavity during operation. 

Services Offered:

  • Sale of refurbished product
  • Repair Service
Category:

Description

We offer refurbished TURBOVAC 361 and TURBOVAC 361C pumps. Please contact us for price and availability. We stock every part to rebuild your pump to like new regardless of its current condition.

Features:

  • Oil-free pump design 
  • Very reliable
  • Easy to operate
  • Compact design
  • Installation in any orientation

Applications:

  • Mass spectrometers
  • Data storage
  • Optical coating
  • Particle accelerators
  • Load locks

Common configurations we offer include:

  • ISO 100 housing without “C” type purge on baseplate (PN 85670)
  • ISO 100 housing with “C” type purge on baseplate (PN 85675)
  • ISO 160 housing without “C” type purge on baseplate (PN 85672)
  • ISO 160 housing with “C” type purge on baseplate (PN 85677)
  • CF 100 housing (PN 85671)
  • CF 160 housing (PN 85673)
  • 4in ASA housing (PN 89423)

Our TURBOVAC rebuild/repair service includes:

  • Complete cleaning of the pump
  • Replacement of all O-rings, seals, and ceramic bearings
  • The pump is balanced to meet or exceed Leybold vibration specifications
  • The pump is run overnight on test
  • Leak tested to 1 x 10^-10 mbar l/s
  • Final vibration data sheet provided with each pump
  • Every pump is refurbished to like new condition
  • We stock new OEM Leybold rotors, stator blades, stator rings, shafts, upper bearing caps, water fittings and more. We have every part needed to refurbish your pump to like new no matter what condition your pump is currently in.

Manuals:

Leybold Vacuum TMP 361 and TMP 151 Manual

Leybold Vacuum TURBOVAC 361 (C) Technical Data and Ordering Information

Leybold Vacuum TURBOVAC Classic Line Product Information

Leybold Vacuum TURBOVAC Line Operating Instructions

Technical Data:

Technical DataTURBOVAC 361 (C)
Connection Inlet DN100 ISO-K / 100 CF160 ISO-K / 160 CF
Connection Outlet DN25 ISO-KF25 ISO-KF
Pumping speed N₂345 l/s400 l/s
Pumping speed Ar350 l/s410 l/s
Pumping speed He340 l/s380 l/s
Pumping speed H₂340 l/s370 l/s
Gas throughput N₂3.0 mbar l/s3.0 mbar l/s
Gas throughput Ar2.5 mbar l/s2.5 mbar l/s
Gas throughput He3.0 mbar l/s3.0 mbar l/s
Gas throughput H₂2.0 mbar l/s2.0 mbar l/s
Compression ratio N₂1 x 10⁹1 x 10⁹
Compression ratio Ar1 x 10⁹1 x 10⁹
Compression ratio He6 x 10⁴6 x 10⁴
Compression ratio H₂3 x 10³3 x 10³
Ultimate pressure< 1 x 10⁻¹⁰ mbar (<7.5 x 10⁻¹¹ Torr)< 1 x 10⁻¹⁰ mbar (<7.5 x 10⁻¹¹ Torr)
Max. foreline pressure for N₂5 x 10⁻¹ mbar (4 x 10⁻¹ Torr)5 x 10⁻¹ mbar (3.8 x 10⁻¹ Torr)
Recommended foreline pumpfrom TRIVAC D 16 B to D 25 Bfrom TRIVAC D 16 B to D 25 B
Nominal rotation speed45000 rpm45000 rpm
Run-up time2 min2 min
Max. power consumption300 W300 W
Power consumption at ultimate pressure70 W70 W
Admissible ambient temperature10 to 55 °C / 50 to 131 °F10 to 55 °C / 50 to 131 °F
Cooling standardWaterWater
Cooling optionalAirAir
Cooling water connection10 mm hose nozzle10 mm hose nozzle
Cooling water consumption15 to 35 l/hr15 to 35 l/hr
Permissible cooling water pressure3 to 7 bar3 to 7 bar
Permissible cooling water temperature10 to 25 °C (50 to 77 °F)10 to 25 °C (50 to 77 °F)
Weight12 kg (26 lbs)12 kg (26 lbs)

Leybold TURBOVAC 361 and TURBOVAC 361C Dimensional Drawing:

Leybold TMP 361 Pumping Speed:

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