Products

Leybold TURBOVAC 361C / TURBOVAC 361

The Leybold TURBOVAC 361 (C) is an oil-free pump for the generation of clean high and ultrahigh vacuum conditions. It has high performance in any orientation and is very reliable.

If pumping corrosive or aggressive gases, the “C” type version of this turbopump that is equipped with a purge port must be used. The turbopump must be purged and vented through its purge port using the optional purge/vent valve. The purge/vent valve allows a constant flow of inert gas into the motor/bearing cavity to prevent harmful process gas from entering the bearing cavity during operation. 

Services Offered:

  • Sale of refurbished product
  • Repair Service

Description

We offer refurbished TURBOVAC 361 C pumps for $5500 and TURBOVAC 361 pumps for $5000. We stock every part to rebuild your pump to like new regardless of its current condition.

Features:

  • Oil-free pump design 
  • Very reliable
  • Easy to operate
  • Compact design
  • Installation in any orientation

Applications:

  • Mass spectrometers
  • Data storage
  • Optical coating
  • Particle accelerators
  • Load locks

Common configurations we offer include:

  • ISO 100 housing without “C” type purge on baseplate(PN 85670)
  • ISO 100 housing with “C” type purge on baseplate (PN 85675)
  • ISO 160 housing without “C” type purge on baseplate(PN 85672)
  • ISO 160 housing with “C” type purge on baseplate (PN 85677)
  • CF 100 housing (PN 85671)
  • CF 160 housing (PN 85673)
  • 4in ASA housing (PN 89423)

Our TURBOVAC rebuild/repair service includes:

  • Complete cleaning of the pump
  • Replacement of all O-rings, seals, and ceramic bearings
  • The pump is balanced to meet or exceed Leybold vibration specifications
  • The pump is run overnight on test
  • Leak tested to 1 x 10^-10 mbar l/s
  • Final vibration data sheet provided with each pump
  • Every pump is refurbished to like new condition
  • We stock new OEM Leybold rotors, stator blades, stator rings, shafts, upper bearing caps, water fittings and more. We have every part needed to refurbish your pump to like new no matter what condition your pump is currently in.

Manuals:

Leybold TURBOVAC 361C / TURBOVAC 361 Manual

Technical Data:

Technical Data TURBOVAC 361 (C)
Connection

      Inlet                                 DN

      Outlet                              DN

100 ISO-K ● 100 CF

25 ISO-KF

160 ISO-K ● 160 CF

25 ISO-KF

Pumping speed

      N2                                  l x s-1

      Ar                                 l x s-1

      He                                l x s-1

      H                                l x s-1

345

350

340

340

400

410

380

370

Gas throughput

      N2                      mbar x l x s-1

      Ar                     mbar x l x s-1

      He                    mbar x l x s-1

      H                   mbar x l x s-1

3.0

2.5

3.0

2.0

3.0

2.5

3.0

2.0

Compression ratio

      N2                      

      Ar                     

      He                    

      H                   

1 x 109

1 x 109

6 x 104

3 x 103

1 x 109

1 x 109

6 x 104

3 x 103

Ultimate pressure     mbar (Torr) < 1 x 10-10 (<7.5 x 10-11) < 1 x 10-10 (<7.5 x 10-11)
Max. foreline pressure for N2 

                                 mbar (Torr)

5 x 10-1 (4 x 10-1) 5 x 10-1 (3.8 x 10-1)
Recommended foreline pump from TRIVAC D 16 B to 

D 25 B

from TRIVAC D 16 B to

D 25 B

Nominal rotation speed        rpm 45000 45000
Run-up time                          min 2 2
Max. power consumption        W 300 300
Power consumption at ultimate pressure                                  W 70 70
Admissible ambient temperature

                                         °C(°F)

10 to 55 (50 to 131) 10 to 55 (50 to 131)
Cooling

      standard

      optional

Water

Air

Water

Air

Cooling water connection 10 mm hose nozzle 10 mm hose nozzle
Cooling water consumption   l/hr 15 to 35 15 to 35
Permissible cooling water pressure                                bar 3 to 7 3 to 7
Permissible cooling water temperature                      °C(°F) 10 to 25 (50 to 77) 10 to 25 (50 to 77)
Weight                            kg (lbs) 12 (26) 12 (26)