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Leybold TURBOVAC 361C / TURBOVAC 361

The Leybold TURBOVAC 361 (C) is an oil-free pump for the generation of clean high and ultrahigh vacuum conditions. It has high performance in any orientation and is very reliable.

If pumping corrosive or aggressive gases, the “C” type version of this turbopump that is equipped with a purge port must be used. The turbopump must be purged and vented through its purge port using the optional purge/vent valve. The purge/vent valve allows a constant flow of inert gas into the motor/bearing cavity to prevent harmful process gas from entering the bearing cavity during operation. 

Services Offered:

  • Sale of refurbished product
  • Repair Service
Category:

Description

We offer refurbished TURBOVAC 361 and TURBOVAC 361C pumps. Please contact us for price and availability. We stock every part to rebuild your pump to like new regardless of its current condition.

Features:

  • Oil-free pump design 
  • Very reliable
  • Easy to operate
  • Compact design
  • Installation in any orientation

Applications:

  • Mass spectrometers
  • Data storage
  • Optical coating
  • Particle accelerators
  • Load locks

Common configurations we offer include:

  • ISO 100 housing without “C” type purge on baseplate (PN 85670)
  • ISO 100 housing with “C” type purge on baseplate (PN 85675)
  • ISO 160 housing without “C” type purge on baseplate (PN 85672)
  • ISO 160 housing with “C” type purge on baseplate (PN 85677)
  • CF 100 housing (PN 85671)
  • CF 160 housing (PN 85673)
  • 4in ASA housing (PN 89423)

Our TURBOVAC rebuild/repair service includes:

  • Complete cleaning of the pump
  • Replacement of all O-rings, seals, and ceramic bearings
  • The pump is balanced to meet or exceed Leybold vibration specifications
  • The pump is run overnight on test
  • Leak tested to 1 x 10^-10 mbar l/s
  • Final vibration data sheet provided with each pump
  • Every pump is refurbished to like new condition
  • We stock new OEM Leybold rotors, stator blades, stator rings, shafts, upper bearing caps, water fittings and more. We have every part needed to refurbish your pump to like new no matter what condition your pump is currently in.

Manuals:

Leybold Vacuum TMP 361 and TMP 151 Manual

Leybold Vacuum TURBOVAC 361 (C) Technical Data and Ordering Information

Leybold Vacuum TURBOVAC Classic Line Product Information

Leybold Vacuum TURBOVAC Line Operating Instructions

Technical Data:

Technical Data TURBOVAC 361 (C)
Connection Inlet DN 100 ISO-K / 100 CF 160 ISO-K / 160 CF
Connection Outlet DN 25 ISO-KF 25 ISO-KF
Pumping speed N₂ 345 l/s 400 l/s
Pumping speed Ar 350 l/s 410 l/s
Pumping speed He 340 l/s 380 l/s
Pumping speed H₂ 340 l/s 370 l/s
Gas throughput N₂ 3.0 mbar l/s 3.0 mbar l/s
Gas throughput Ar 2.5 mbar l/s 2.5 mbar l/s
Gas throughput He 3.0 mbar l/s 3.0 mbar l/s
Gas throughput H₂ 2.0 mbar l/s 2.0 mbar l/s
Compression ratio N₂ 1 x 10⁹ 1 x 10⁹
Compression ratio Ar 1 x 10⁹ 1 x 10⁹
Compression ratio He 6 x 10⁴ 6 x 10⁴
Compression ratio H₂ 3 x 10³ 3 x 10³
Ultimate pressure < 1 x 10⁻¹⁰ mbar (<7.5 x 10⁻¹¹ Torr) < 1 x 10⁻¹⁰ mbar (<7.5 x 10⁻¹¹ Torr)
Max. foreline pressure for N₂ 5 x 10⁻¹ mbar (4 x 10⁻¹ Torr) 5 x 10⁻¹ mbar (3.8 x 10⁻¹ Torr)
Recommended foreline pump from TRIVAC D 16 B to D 25 B from TRIVAC D 16 B to D 25 B
Nominal rotation speed 45000 rpm 45000 rpm
Run-up time 2 min 2 min
Max. power consumption 300 W 300 W
Power consumption at ultimate pressure 70 W 70 W
Admissible ambient temperature 10 to 55 °C / 50 to 131 °F 10 to 55 °C / 50 to 131 °F
Cooling standard Water Water
Cooling optional Air Air
Cooling water connection 10 mm hose nozzle 10 mm hose nozzle
Cooling water consumption 15 to 35 l/hr 15 to 35 l/hr
Permissible cooling water pressure 3 to 7 bar 3 to 7 bar
Permissible cooling water temperature 10 to 25 °C (50 to 77 °F) 10 to 25 °C (50 to 77 °F)
Weight 12 kg (26 lbs) 12 kg (26 lbs)

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